Modeling for Chemical Vapor Deposition
dc.contributor.author | Geiser, Jürgen | |
dc.date.accessioned | 2017-06-15T18:16:58Z | |
dc.date.available | 2017-06-15T18:16:58Z | |
dc.date.created | 2011-08-11 | |
dc.date.issued | 2011-08-11 | |
dc.identifier.issn | 0863-0976 | |
dc.identifier.uri | http://edoc.hu-berlin.de/18452/3433 | |
dc.description.abstract | In this paper we present modeling and simulation for chemical vapor deposition (CVD) on metallic bipolar plates. In the models we discuss the application of different models to simulate the plasma-transport of chemical reactants in the gas chamber. We take into account one-dimensional models, that can be treated analytically under some assumptions and multi-dimensional models that are solved numerically with software packages. Because of the multi-scaling problem of the physical behavior, we discuss adapted models in different domains and scales. The near- and far-field contexts are based on large scales that can be treated with continuous models, such as convection-diffusion-reaction equations, and small scales that are based on chemical and molecular models, e.g. Boltzmann-equations. The results are discussed with physical experiments to give valid models for the assumed growth of thin layers. | eng |
dc.language.iso | eng | |
dc.publisher | Humboldt-Universität zu Berlin, Mathematisch-Naturwissenschaftliche Fakultät II, Institut für Mathematik | |
dc.rights.uri | http://rightsstatements.org/vocab/InC/1.0/ | |
dc.subject | Chemical vapor deposition | eng |
dc.subject | multi-scale problem | eng |
dc.subject | convection-diffusion equations | eng |
dc.subject.ddc | 510 Mathematik | |
dc.title | Modeling for Chemical Vapor Deposition | |
dc.type | book | |
dc.identifier.urn | urn:nbn:de:kobv:11-100190685 | |
dc.identifier.doi | http://dx.doi.org/10.18452/2781 | |
local.edoc.pages | 22 | |
local.edoc.type-name | Buch | |
local.edoc.container-type | series | |
local.edoc.container-type-name | Schriftenreihe | |
local.edoc.container-year | 2008 | |
dc.title.subtitle | Meso- and Microscale Models | |
dc.identifier.zdb | 2075199-0 | |
bua.series.name | Preprints aus dem Institut für Mathematik | |
bua.series.issuenumber | 2008,1 |