Zur Kurzanzeige

2011-08-11Buch DOI: 10.18452/2781
Modeling for Chemical Vapor Deposition
dc.contributor.authorGeiser, Jürgen
dc.date.accessioned2017-06-15T18:16:58Z
dc.date.available2017-06-15T18:16:58Z
dc.date.created2011-08-11
dc.date.issued2011-08-11
dc.identifier.issn0863-0976
dc.identifier.urihttp://edoc.hu-berlin.de/18452/3433
dc.description.abstractIn this paper we present modeling and simulation for chemical vapor deposition (CVD) on metallic bipolar plates. In the models we discuss the application of different models to simulate the plasma-transport of chemical reactants in the gas chamber. We take into account one-dimensional models, that can be treated analytically under some assumptions and multi-dimensional models that are solved numerically with software packages. Because of the multi-scaling problem of the physical behavior, we discuss adapted models in different domains and scales. The near- and far-field contexts are based on large scales that can be treated with continuous models, such as convection-diffusion-reaction equations, and small scales that are based on chemical and molecular models, e.g. Boltzmann-equations. The results are discussed with physical experiments to give valid models for the assumed growth of thin layers.eng
dc.language.isoeng
dc.publisherHumboldt-Universität zu Berlin, Mathematisch-Naturwissenschaftliche Fakultät II, Institut für Mathematik
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/
dc.subjectChemical vapor depositioneng
dc.subjectmulti-scale problemeng
dc.subjectconvection-diffusion equationseng
dc.subject.ddc510 Mathematik
dc.titleModeling for Chemical Vapor Deposition
dc.typebook
dc.identifier.urnurn:nbn:de:kobv:11-100190685
dc.identifier.doihttp://dx.doi.org/10.18452/2781
local.edoc.pages22
local.edoc.type-nameBuch
local.edoc.container-typeseries
local.edoc.container-type-nameSchriftenreihe
local.edoc.container-year2008
dc.title.subtitleMeso- and Microscale Models
dc.identifier.zdb2075199-0
bua.series.namePreprints aus dem Institut für Mathematik
bua.series.issuenumber2008,1

Zur Kurzanzeige