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2011-08-11Buch DOI: 10.18452/2791
Modeling and Simulation for Physical Vapor Deposition
dc.contributor.authorGeiser, Jürgen
dc.contributor.authorRöhle, Robert
dc.date.accessioned2017-06-15T18:18:53Z
dc.date.available2017-06-15T18:18:53Z
dc.date.created2011-08-11
dc.date.issued2011-08-11
dc.identifier.issn0863-0976
dc.identifier.urihttp://edoc.hu-berlin.de/18452/3443
dc.description.abstractIn this paper, we present modeling and simulation for physical vapor deposition for metallic bipolar plates. In the models, we discuss the application of different models to simulate the transport of chemical reactions of the gas species in the gas-chamber. The so called sputter process is an extremely sensitive process to deposit thin layers to metallic plates. We taken into account lower order models to obtain first results with respect to the gas fluxes and the kinetics in the chamber. The model equations can be treated analytically in some circumstances and complicate multi-dimensional models are solved numerically with a software-packages (UG unstructed grids). Because of multi-scaling and multi-physical behavior of the models, we discuss adapted schemes to solve more accurate in the different domains and scales. The results are discussed with physical experiments to give a valid model for the assumed growth of thin layers.eng
dc.language.isoeng
dc.publisherHumboldt-Universität zu Berlin, Mathematisch-Naturwissenschaftliche Fakultät II, Institut für Mathematik
dc.subjectPhysical vapor depositioneng
dc.subjectmulti-scale problem convection-diffusion equationseng
dc.subjectreaction equationseng
dc.subjectsplitting methodseng
dc.subject.ddc510 Mathematik
dc.titleModeling and Simulation for Physical Vapor Deposition
dc.typebook
dc.subtitleMultiscale Model
dc.identifier.urnurn:nbn:de:kobv:11-100190791
dc.identifier.doihttp://dx.doi.org/10.18452/2791
local.edoc.container-titlePreprints aus dem Institut für Mathematik
local.edoc.pages32
local.edoc.type-nameBuch
local.edoc.container-typeseries
local.edoc.container-type-nameSchriftenreihe
local.edoc.container-volume2008
local.edoc.container-issue14
local.edoc.container-year2008
local.edoc.container-erstkatid2075199-0

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