2011-08-11Buch DOI: 10.18452/2791
Modeling and Simulation for Physical Vapor Deposition
 dc.contributor.author Geiser, Jürgen dc.contributor.author Röhle, Robert dc.date.accessioned 2017-06-15T18:18:53Z dc.date.available 2017-06-15T18:18:53Z dc.date.created 2011-08-11 dc.date.issued 2011-08-11 dc.identifier.issn 0863-0976 dc.identifier.uri http://edoc.hu-berlin.de/18452/3443 dc.description.abstract In this paper, we present modeling and simulation for physical vapor deposition for metallic bipolar plates. In the models, we discuss the application of different models to simulate the transport of chemical reactions of the gas species in the gas-chamber. The so called sputter process is an extremely sensitive process to deposit thin layers to metallic plates. We taken into account lower order models to obtain first results with respect to the gas fluxes and the kinetics in the chamber. The model equations can be treated analytically in some circumstances and complicate multi-dimensional models are solved numerically with a software-packages (UG unstructed grids). Because of multi-scaling and multi-physical behavior of the models, we discuss adapted schemes to solve more accurate in the different domains and scales. The results are discussed with physical experiments to give a valid model for the assumed growth of thin layers. eng dc.language.iso eng dc.publisher Humboldt-Universität zu Berlin, Mathematisch-Naturwissenschaftliche Fakultät II, Institut für Mathematik dc.subject Physical vapor deposition eng dc.subject multi-scale problem convection-diffusion equations eng dc.subject reaction equations eng dc.subject splitting methods eng dc.subject.ddc 510 Mathematik dc.title Modeling and Simulation for Physical Vapor Deposition dc.type book dc.subtitle Multiscale Model dc.identifier.urn urn:nbn:de:kobv:11-100190791 dc.identifier.doi http://dx.doi.org/10.18452/2791 local.edoc.container-title Preprints aus dem Institut für Mathematik local.edoc.pages 32 local.edoc.type-name Buch local.edoc.container-type series local.edoc.container-type-name Schriftenreihe local.edoc.container-volume 2008 local.edoc.container-issue 14 local.edoc.container-year 2008 local.edoc.container-erstkatid 2075199-0