Browsing Preprints aus dem Institut für Mathematik by Subject "Hard sphere interaction"

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2011-09-27Buch

Monte Carlo simulations concerning modeling DC and high power pulsed magnetron sputtering for Ti₃SiC₂ including high pressures and ion deposition probabilities

Geiser, Jürgen

We motivate our study by simulating the particle transport of a thin film deposition process done by PVD (physical vapor deposition) processes. In this paper we present a new model taken into account a higher pressure ...