Browsing Preprints aus dem Institut für Mathematik by Subject "High power pulsed magnetron sputtering"

Now showing items 1-2 of 2

2011-09-20Buch

Monte Carlo simulations concerning elastic scattering with application to DC and high power pulsed magnetron sputtering for Ti₃SiC₂

Geiser, Jürgen; Blankenburg, Sven

We motivate our studying on simulating thin film deposition processes that can be done by sputtering processes. In the last years, the research in producing high temperature films by depositing of low pressure processes ...
2011-09-27Buch

Monte Carlo simulations concerning modeling DC and high power pulsed magnetron sputtering for Ti₃SiC₂ including high pressures and ion deposition probabilities

Geiser, Jürgen

We motivate our study by simulating the particle transport of a thin film deposition process done by PVD (physical vapor deposition) processes. In this paper we present a new model taken into account a higher pressure ...