Browsing Preprints aus dem Institut für Mathematik by Subject "Particle-In-Cell-Monte-Carlo-Collisions"

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2011-09-20Buch

Monte Carlo simulations concerning elastic scattering with application to DC and high power pulsed magnetron sputtering for Ti₃SiC₂

Geiser, Jürgen; Blankenburg, Sven

We motivate our studying on simulating thin film deposition processes that can be done by sputtering processes. In the last years, the research in producing high temperature films by depositing of low pressure processes ...